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smartWLI nanoscan 3D inline roughness sensor - designed for highest resolution

3D surface measurement sensor with highest resolution, with exchangeable objective
• Designed for highest resolution and max. 100µm measurement range in Z-axis
• Digitalization in z direction 0.01pm according to standard ISO 25174-604 2.1.14, all objectives
• 5MP high-resolution camera and > 10 TFLOPS and 3,000 cores graphic board
• Real-time 3D data calculation, optimized for nanostructures and functional microstructures with high imaging ratio
• Sampling interval in XY-direction 0.01µm according to standard ISO 25174-604 2.1.12/13
• Smallest measuring distance Wl approx. 0.1µm according to standard ISO 25174-604 2.1.15
• Maximal angle up to 90° according to standard ISO 25174-604 2.1.18, 2.2.6
• measuring points with stitching
• Lowest level of systeml noise / Z-resolution (0.03nm) → system noise level measurable in the pm range according to standard ISO 25178-604 2.1.11
• Available as sensor component with SDK for integration and in laboratory version (with stand and XY positioning table)
• Available interferometry objectives: 2.5x, 5x, 10x, 20x, 50x, 100x, 115x*
*100x Olympus WLI objective

Further reading

Exhibitor: WinWinTec International Group GmbH & Co. KG


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