SIOS Meßtechnik GmbH

Booth number 2622

Precision in Measurement

About us

Following the motto "Precision in Measurement" SIOS Meßtechnik GmbH develops and manufactures laser interferometric- and precision measuring instruments for calibration purposes, nano metrology- and OEM applications mostly in the high technology sector. SIOS technology guarantees measurements of displacements, angles, vibrations and and other physical parameters with highest resolution and low measurement uncertainty. Thanks to the deep inhouse production capability, SIOS Meßtechnik GmbH has developed as a preferred global supplier of customized solutions of high-precision measurement- and calibration systems for both - science and industry. Typical application fields are: Precision metrology: machine tool and axis calibration; applications in optics- and semiconductor industry; medical- and astro technology; nanometrology and geosciences.

SIOS Meßtechnik GmbH
Am Vogelherd 46
98693 Ilmenau

Phone: +49 3677 64470

Tianjin MicroNano Manufacturing Tech Co. Ltd.
3rd Fl., A2, No. 80, 4th Avenue, TEDA
300457 VRC - TIANJIN
P.R. China


Products and services

Laser Interferometers (single and triple-beam laser interferometers)
Laser Vibrometers
Laser interferometric Probes
Stabilised He-Ne lasers
Nanopositioning and Nanomeasuring Machines
Customised special solutions
Length and angle measurement - Laser interferometer model SP 5000 TR

High-precision laser interferometers with three perfectly aligned and independently working measuring beams for simultaneous measurements of length and angle Either a mirror or the included reflector combination can be used as a reflector. Optionally, an alignment aid can be integrated in the sensor.

Further reading

Length measurement - Laser interferometer model SP 5000 NG

Universal length measuring systems of the highest accuracy for measurements and calibrations of guides, measuring workstations and positioning tables, measuring machines and machine tools and for multiple coordinated measurements. The measuring systems are easy to handle, have an integrated alignment aid and are able to work with just a reflective surface as a reflector.

Further reading

Length, differential length and angle measurement - Laser interferometer model SP 5000 DI

Highly stable laser interferometer with two parallel measuring beams for a wide variety of
applications in the field of science and for industrial use
Due to differential measurement a remarkable stability for long-term usage and a compensation
of the influences of air can be achieved.

Further reading

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